Back to Search Start Over

The Reliability Impact of Bi Doping on the HfO2 Charge-Trapping Layer: A First-Principles Study.

Authors :
Ye, Fengyu
Zhu, Ying
Yuan, Jun-Hui
Wang, Jiafu
Source :
Journal of Electronic Materials; Jul2024, Vol. 53 Issue 7, p3756-3767, 12p
Publication Year :
2024

Abstract

Hafnia has emerged as a promising material for charge-trapping memory. However, enhancing its trapping performance remains a significant research challenge. In this work, we investigate the influence of Bi impurities on the reliability of HfO<subscript>2</subscript>-based charge-trapping memory devices using first-principles calculations. By examining the impact of Bi impurities on the formation of oxygen vacancies (V<subscript>O</subscript>), we obtained the lowest-energy Bi-V<subscript>O3</subscript> defect model. Through an exploration of the microstructure, electronic structure, and Bader charge distribution of the Bi-V<subscript>O3</subscript> defect system, we compare its device performance with the Al-V<subscript>O3</subscript> defect system. Our findings demonstrate that the Bi-V<subscript>O3</subscript> defect system exhibits superior electronic retention ability compared to the Al-V<subscript>O3</subscript> defect system. This suggests that introducing Bi impurities into HfO<subscript>2</subscript> can enhance the reliability of memory devices and presents a promising dopant solution for improving memory performance. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
03615235
Volume :
53
Issue :
7
Database :
Complementary Index
Journal :
Journal of Electronic Materials
Publication Type :
Academic Journal
Accession number :
177797276
Full Text :
https://doi.org/10.1007/s11664-024-11066-0