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26‐1: Embedded a‐Si Photo‐Transistor Sensors Integration in Remote Optical Touch‐input Panel Using Four‐Mask Process Architecture Technology.

Authors :
Cho, An‐Thung
Yang, Feng‐yun
Zhang, Young
Wang, Ming‐liang
Feng, Jin‐chang
Chen, Ni
Li, Wen‐xin
Ruan, Ting‐ting
Guo, Dong‐sheng
Lin, Steve
Hsu, James
Chen, Wade
Source :
SID Symposium Digest of Technical Papers; Jun2024, Vol. 55 Issue 1, p321-324, 4p
Publication Year :
2024

Abstract

An optical type touch‐input flat panel is designed. The driving system is based on the passive pixel sensor (PPS) array with amorphous silicon (a‐Si) TFT technology. The embedded sensing structure of the optical sensor is using the a‐Si TFT phototransistor and four‐mask process architecture technology. This paper presents a primary optical pixel sensor circuit that utilizes hydrogenated amorphous silicon photo‐transistor sensor. The a‐Si TFT phototransistor sensor is high reliability by using Multi‐N+ layer in the a‐Si TFT structure. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
0097966X
Volume :
55
Issue :
1
Database :
Complementary Index
Journal :
SID Symposium Digest of Technical Papers
Publication Type :
Academic Journal
Accession number :
178715334
Full Text :
https://doi.org/10.1002/sdtp.17520