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Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis.

Authors :
Zhu, Ziyi
Zhang, Shougang
Ruan, Jun
Source :
Journal of Physics: Conference Series; 2024, Vol. 2800 Issue 1, p1-9, 9p
Publication Year :
2024

Details

Language :
English
ISSN :
17426588
Volume :
2800
Issue :
1
Database :
Complementary Index
Journal :
Journal of Physics: Conference Series
Publication Type :
Academic Journal
Accession number :
178782196
Full Text :
https://doi.org/10.1088/1742-6596/2800/1/012009