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High-resolution coherence scanning immersion interferometry for characterization of technical surface topographies.
- Source :
- Technisches Messen; 2024 Supplement 1, Vol. 91 Issue 1, p84-89, 6p
- Publication Year :
- 2024
-
Abstract
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- Subjects :
- SURFACE analysis
NUMERICAL apertures
SURFACE topography
INTERFEROMETRY
LITHOGRAPHY
Subjects
Details
- Language :
- German
- ISSN :
- 01718096
- Volume :
- 91
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Technisches Messen
- Publication Type :
- Academic Journal
- Accession number :
- 178831714
- Full Text :
- https://doi.org/10.1515/teme-2024-0052