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Realization of Atomically Uniform ALD-Al2O3 and TiO2 on SiO2 and GeO2 by UV-Ozone Treatment.
- Source :
- ECS Meeting Abstracts; 2024, Vol. MA2024-01 Issue 1, p1296-1296, 1p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 10918213
- Volume :
- MA2024-01
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- ECS Meeting Abstracts
- Publication Type :
- Periodical
- Accession number :
- 179179078
- Full Text :
- https://doi.org/10.1149/MA2024-01211296mtgabs