在VLSI 制造中基于辅助图形的灰度光刻形成三维结构.

Details

Language :

Chinese

ISSN :

1003353X

Volume :

49

Issue :

9

Database :

Complementary Index

Journal :

Semiconductor Technology / Bandaoti Jishu

Publication Type :

Academic Journal

Accession number :

179404163

Full Text :

https://doi.org/10.13290/j.cnki.bdtjs.2024.09.008