Integrating Strain Gauge Feedback with Adaptive Sliding Mode Motion Control for Piezoelectric Nanopositioning Stage.

This paper presents an adaptive sliding mode control (ASMC) scheme based on strain gauge position feedback for compensating for motion errors in a piezoelectric nanopositioning stages and ensures precise and reliable motion tracking control. The innovation of this scheme lies in calibrating the relationship between the feedback voltage of the strain gauge and the actual stage displacement. Thus, the calibrated feedback displacement is directly used as the position feedback signal for the ASMC scheme. Adaptive rules are employed to adjust the control gains, thereby eliminating the requirement to determine the upper bound of the disturbance. The stability of the ASMC strategy is theoretically proven within the Lyapunov framework. Comparative experiments under external disturbances have confirmed the superiority of the proposed control scheme. Results demonstrate that the proposed control scheme exhibits superior robust tracking performance compared to the traditional sliding mode control (SMC) scheme. [ABSTRACT FROM AUTHOR]