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Calibration method for rotating-analyser-type spectral imaging ellipsometers.
- Source :
- Measurement Science & Technology; 3/1/2005, Vol. 16 Issue 3, p716-722, 7p
- Publication Year :
- 2005
-
Abstract
- Data reduction and calibration procedures are introduced for a novel rotating-analyser-type spectral imaging ellipsometer. Using a monaxial power spectrograph, we developed a unique spectral imaging ellipsometer. It combines one-dimensional imaging ellipsometry with spectroscopic ellipsometry, and enables real-time measurement of the optical parameters and dimensional structures of patterned or multilayered thin film. It also has more calibration factors than conventional ellipsometers. We therefore present a method using Jones matrices for describing the polarization sensitivity of the spectrograph and random noise of the CCD array. For a patterned SiO<subscript>2</subscript> layer on a silicon wafer, we used the spectral imaging ellipsometer to obtain a one-dimensional thickness profile. [ABSTRACT FROM AUTHOR]
- Subjects :
- PHYSICAL measurements
THIN films
TIME measurements
CALIBRATION
Subjects
Details
- Language :
- English
- ISSN :
- 09570233
- Volume :
- 16
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Measurement Science & Technology
- Publication Type :
- Academic Journal
- Accession number :
- 18463579
- Full Text :
- https://doi.org/10.1088/0957-0233/16/3/014