Radio-frequency electronegative gas discharge behaviour in a parallel-plate reactor for material processing.

MLA

Elaissi, S., et al. “Radio-Frequency Electronegative Gas Discharge Behaviour in a Parallel-Plate Reactor for Material Processing.” Plasma Devices & Operations, vol. 14, no. 1, Mar. 2006, pp. 27–45. EBSCOhost, https://doi.org/10.1080/10519990500493874.

APA

Elaissi, S., Yousfi, M., Helali, H., Kazziz, S., Charrada, K., & Sassi, M. (2006). Radio-frequency electronegative gas discharge behaviour in a parallel-plate reactor for material processing. Plasma Devices & Operations, 14(1), 27–45. https://doi.org/10.1080/10519990500493874

Chicago

Elaissi, S., M. Yousfi, H. Helali, S. Kazziz, K. Charrada, and M. Sassi. 2006. “Radio-Frequency Electronegative Gas Discharge Behaviour in a Parallel-Plate Reactor for Material Processing.” Plasma Devices & Operations 14 (1): 27–45. doi:10.1080/10519990500493874.