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A New Technique for the Fabrication of Thin Silicon Radiation Detectors.
- Source :
- IEEE Transactions on Nuclear Science; Jun99 Part 1 of 3, Vol. 46 Issue 3, p218, 3p, 1 Black and White Photograph, 1 Diagram, 2 Graphs
- Publication Year :
- 1999
-
Abstract
- Presents information on a study which discussed the technique for the fabrication of thin silicon radiation detectors. Features of silicon on insulator wafers; Details on detector fabrication using planar technology; Characteristics of detector; Conclusions.
- Subjects :
- SILICON-on-insulator technology
DETECTORS
Subjects
Details
- Language :
- English
- ISSN :
- 00189499
- Volume :
- 46
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Nuclear Science
- Publication Type :
- Academic Journal
- Accession number :
- 2104344
- Full Text :
- https://doi.org/10.1109/23.775517