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Just-in-Time Adaptive Disturbance Estimation for Run-to-Run Control of Semiconductor Processes.
- Source :
- IEEE Transactions on Semiconductor Manufacturing; Aug2006, Vol. 19 Issue 3, p298-315, 18p, 4 Black and White Photographs, 1 Chart, 18 Graphs
- Publication Year :
- 2006
-
Abstract
- Run-to-run control is the term used for the application of discrete parts manufacturing control as practiced in the semiconductor industry. This paper presents a new algorithm for use in run-to-run control that has been designed to address some of the challenging issues unique to batch-type manufacturing. Just-in-time adaptive disturbance estimation (JADE) uses recursive weighted least squares parameter estimation to identify the contributions to variation that are dependent upon manufacturing context. The strengths and weaknesses of the JADE algorithm are demonstrated in a series of test cases developed to separate the various disturbances and processing issues a control system would be expected to encounter. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 08946507
- Volume :
- 19
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Semiconductor Manufacturing
- Publication Type :
- Academic Journal
- Accession number :
- 22064955
- Full Text :
- https://doi.org/10.1109/TSM.2006.879409