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SEM Linear Measurement in a Wide Magnification Range.
- Source :
- Russian Microelectronics; Nov2004, Vol. 33 Issue 6, p342-349, 8p
- Publication Year :
- 2004
-
Abstract
- A method of SEM linear measurement is proposed in which the reference marker displayed on the screen is used as a standard. The method works in a wide range of magnification without magnification calibration. Calibration of the marker against the MShPS-2.0K linear standard is described. The characteristics of the marker are investigated as functions of scanning range and declared effective marker length for the CamScan S-4 model of SEM. The maximum allowable calibration interval is determined for this SEM. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10637397
- Volume :
- 33
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Russian Microelectronics
- Publication Type :
- Academic Journal
- Accession number :
- 22101743