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Relaxation oscillations in a capacitive discharge chamber connected to a peripheral grounded chamber.
- Source :
- Journal of Applied Physics; 11/15/2006, Vol. 100 Issue 10, p103302, 9p, 3 Diagrams, 3 Charts, 10 Graphs
- Publication Year :
- 2006
-
Abstract
- We have observed relaxation oscillations in an argon capacitive discharge connected to a peripheral grounded chamber through a slot with dielectric spacers. The oscillations, observed from time-varying optical emission of the main discharge chamber, show, for example, a high frequency (∼40 kHz) relaxation oscillation at 100 mTorr, with absorbed power near that for peripheral breakdown, and a low frequency (∼3 Hz) oscillation, at higher absorbed power. The high frequency oscillation is found to ignite a plasma in the slot, but usually not in the periphery. We interpret the high frequency oscillations using an electromagnetic model of the slot impedance, coupled to a circuit analysis of the system including the matching network. The model results are in general agreement with the experimental observations and indicate a variety of behaviors dependent on the matching conditions. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 100
- Issue :
- 10
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 23290536
- Full Text :
- https://doi.org/10.1063/1.2384776