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A method for computing ion energy distributions for multifrequency capacitive discharges.
- Source :
- Journal of Applied Physics; 3/1/2007, Vol. 101 Issue 5, p056105-N.Pag, 3p, 5 Graphs
- Publication Year :
- 2007
-
Abstract
- The ion energy distribution (IED) at a surface is an important parameter for processing in multiple radio frequency driven capacitive discharges. An analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with particle-in-cell simulations over a wide range of single, dual, and triple frequency driven capacitive discharge excitations. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 101
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 24422208
- Full Text :
- https://doi.org/10.1063/1.2435975