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Self - Organized Si Dots On Ge Substrates.
- Source :
- AIP Conference Proceedings; 2007, Vol. 893 Issue 1, p87-88, 2p, 4 Color Photographs
- Publication Year :
- 2007
-
Abstract
- The epitaxial growth conditions for silicon on germanium substrates were investigated as a function of growth temperature and monolayer coverage. Island formation was observed for the hole studied temperature range, although strong alloying with the substrate occurred for the highest temperatures. Carbon pre-deposition offers suitable nucleation centers for the Si island and reduction of alloying. pre-structured Ge substrates were prepared to enhance islanding and to achieve ordering. © 2007 American Institute of Physics [ABSTRACT FROM AUTHOR]
- Subjects :
- EPITAXY
SILICON
GERMANIUM
CRYSTAL growth
ALLOYS
Subjects
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 893
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 24985421
- Full Text :
- https://doi.org/10.1063/1.2729783