Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout.

MLA

Cocuzza, M., et al. “Silicon Laterally Resonant Microcantilevers for Absolute Pressure Measurement with Integrated Actuation and Readout.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 26, no. 2, Mar. 2008, pp. 541–50. EBSCOhost, https://doi.org/10.1116/1.2870221.

APA

Cocuzza, M., Ferrante, I., Ricci, A., Giuri, E., Scaltrito, L., Bich, D., Merialdo, A., Schina, P., & Correale, R. (2008). Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 26(2), 541–550. https://doi.org/10.1116/1.2870221

Chicago

Cocuzza, M., I. Ferrante, A. Ricci, E. Giuri, L. Scaltrito, D. Bich, A. Merialdo, P. Schina, and R. Correale. 2008. “Silicon Laterally Resonant Microcantilevers for Absolute Pressure Measurement with Integrated Actuation and Readout.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 26 (2): 541–50. doi:10.1116/1.2870221.