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Vibrational activation in direct and precursor-mediated chemisorption of SiH4 on Si(100).
- Source :
- Journal of Chemical Physics; 8/28/2008, Vol. 129 Issue 8, p081103, 4p, 2 Graphs
- Publication Year :
- 2008
-
Abstract
- The quantum state-resolved reactivity S<subscript>0</subscript> of SiH<subscript>4</subscript> on Si(100)-2×1 has been measured for the first time for two vibrationally excited Si–H stretch local mode states (|2000> and |1100>) as well the ground state S<subscript>0</subscript> as a function of translational energy E<subscript>n</subscript> and surface temperature T<subscript>s</subscript>. We observe evidence for both direct and precursor-mediated chemisorption pathways. As expected, increasing E<subscript>n</subscript> (or T<subscript>s</subscript>) decreases S<subscript>0</subscript> for the precursor-mediated reaction and increases S<subscript>0</subscript> for the direct chemisorption. However, vibrational excitation of the incident SiH<subscript>4</subscript> increases S<subscript>0</subscript> for both the direct and the precursor-mediated pathway with a higher S<subscript>0</subscript> for the |2000> state than for the |1100> state, indicating a nonstatistical reaction mechanism. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00219606
- Volume :
- 129
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Journal of Chemical Physics
- Publication Type :
- Academic Journal
- Accession number :
- 34169309
- Full Text :
- https://doi.org/10.1063/1.2976563