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Strain relaxation and mosaic structure in relaxed SiGe layers.
- Source :
- Applied Physics Letters; 6/28/1993, Vol. 62 Issue 26, p3464, 3p, 3 Graphs
- Publication Year :
- 1993
-
Abstract
- Examines strain relaxation and mosaic structure in relaxed silicon germanide (SiGe) alloy layers. Use of high-resolution x-ray diffraction in characterizing strained SiGe layers and superlattices; Determination of the importance of mosaic structure; Discussion on the effect of threading dislocations on the x-ray peak widths.
- Subjects :
- ALLOYS
RELAXATION phenomena
X-ray diffraction
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 62
- Issue :
- 26
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4329802
- Full Text :
- https://doi.org/10.1063/1.109021