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Curriculum Development in Microelectromechanical Systems in Mechanical Engineering.

Authors :
Liwei Lin
Source :
IEEE Transactions on Education; Feb2001, Vol. 44 Issue 1, p61, 6p, 4 Diagrams, 2 Charts
Publication Year :
2001

Abstract

Focuses on curriculum development for microelectromechanical systems (MEMS) in the Mechanical Engineering and Applied Mechanics Department of the University of Michigan, Ann Arbor, Michigan. MEMS program in mechanical engineering; Weekly course topics for introduction to MEMS; Special topics in MEMS devices and fabrication; MEMS process and testing laboratories.

Details

Language :
English
ISSN :
00189359
Volume :
44
Issue :
1
Database :
Complementary Index
Journal :
IEEE Transactions on Education
Publication Type :
Academic Journal
Accession number :
4573408
Full Text :
https://doi.org/10.1109/13.912711