Back to Search Start Over

Atomic Layer Deposition of Strontium Titanate Films Using Sr(tBu3Cp)2 and Ti(OMe)4.

Atomic Layer Deposition of Strontium Titanate Films Using Sr(tBu3Cp)2 and Ti(OMe)4.

Authors :
Popovici, M.
Van Elshocht, S.
Menou, N.
Swerts, J.
Pierreux, D.
Delabie, A.
Brijs, B.
Conard, T.
Opsomer, K.
Maes, J. W.
Wouters, D. J.
Kittl, J. A.
Source :
Journal of The Electrochemical Society; 2010, Vol. 157 Issue 1, pG1-G6, 6p
Publication Year :
2010

Details

Language :
English
ISSN :
00134651
Volume :
157
Issue :
1
Database :
Complementary Index
Journal :
Journal of The Electrochemical Society
Publication Type :
Academic Journal
Accession number :
48211464
Full Text :
https://doi.org/10.1149/1.3244213