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Atomic Layer Deposition of Strontium Titanate Films Using Sr(tBu3Cp)2 and Ti(OMe)4.
Atomic Layer Deposition of Strontium Titanate Films Using Sr(tBu3Cp)2 and Ti(OMe)4.
- Source :
- Journal of The Electrochemical Society; 2010, Vol. 157 Issue 1, pG1-G6, 6p
- Publication Year :
- 2010
Details
- Language :
- English
- ISSN :
- 00134651
- Volume :
- 157
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Journal of The Electrochemical Society
- Publication Type :
- Academic Journal
- Accession number :
- 48211464
- Full Text :
- https://doi.org/10.1149/1.3244213