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The art of building small.
- Source :
- Scientific American; Sep2001, Vol. 285 Issue 3, p38-47, 10p, 1 Color Photograph, 4 Diagrams
- Publication Year :
- 2001
-
Abstract
- Reports on methods discovered by researchers for fabricating nanostructures. Similar processes to photolithography, the process by which silicon microchips are fabricated; Explanation of nano-scale structures; Use of electron-beam lithography; Soft lithography as a means of producing nanochips; Other techniques; Possible applications.
Details
- Language :
- English
- ISSN :
- 00368733
- Volume :
- 285
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Scientific American
- Publication Type :
- Periodical
- Accession number :
- 4995227
- Full Text :
- https://doi.org/10.1038/scientificamerican0901-38