A Pillar-Shaped Antifuse-Based Silicon Chemical Sensor and Actuator.

MLA

Kovalgin, A. Y., et al. “A Pillar-Shaped Antifuse-Based Silicon Chemical Sensor and Actuator.” IEEE Sensors Journal, vol. 7, no. 1, Jan. 2007, pp. 18–27. EBSCOhost, https://doi.org/10.1109/JSEN.2006.888602.

APA

Kovalgin, A. Y., Holleman, J., & Iordache, G. (2007). A Pillar-Shaped Antifuse-Based Silicon Chemical Sensor and Actuator. IEEE Sensors Journal, 7(1), 18–27. https://doi.org/10.1109/JSEN.2006.888602

Chicago

Kovalgin, A. Y., J. Holleman, and G. Iordache. 2007. “A Pillar-Shaped Antifuse-Based Silicon Chemical Sensor and Actuator.” IEEE Sensors Journal 7 (1): 18–27. doi:10.1109/JSEN.2006.888602.