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Electronic and bonding structures of amorphous Si–C–N thin films by x-ray absorption spectroscopy.
- Source :
- Applied Physics Letters; 10/8/2001, Vol. 79 Issue 15, p2393, 3p, 1 Chart, 3 Graphs
- Publication Year :
- 2001
-
Abstract
- X-ray absorption near edge structure (XANES) spectra of hard amorphous a-Si–C–N thin films with various compositions were measured at the C and N K-edge using sample drain current and fluorescent modes. The C K-edge XANES spectra of a-Si–C–N contain a relatively large 1s→π[sup *] peak, indicating that a substantial percentage of carbon atoms in the a-Si–C–N films have sp[sup 2] or graphite-like bonding. Both the observed sp[sup 2] intensity and the Young’s modulus decrease with an increase in the carbon content. For N K-edge XANES spectra of the a-Si–C–N films we find the emergence of a sharp peak near the threshold when the carbon content is larger than between 9% and 36%, which indicates that carbon and nitrogen atoms tend to form local graphitic carbon nitride. © 2001 American Institute of Physics. [ABSTRACT FROM AUTHOR]
- Subjects :
- X-ray absorption near edge structure
THIN films
SPECTRUM analysis
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 79
- Issue :
- 15
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 5306362
- Full Text :
- https://doi.org/10.1063/1.1409275