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The silane depletion fraction as an indicator for the amorphous/crystalline silicon interface passivation quality.
- Source :
- Applied Physics Letters; 11/1/2010, Vol. 97 Issue 18, p183505, 3p
- Publication Year :
- 2010
-
Abstract
- In silicon heterojunction solar cells, thin amorphous silicon layers passivate the crystalline silicon wafer surfaces. By using in situ diagnostics during plasma-enhanced chemical vapor deposition (PECVD), the authors report how the passivation quality of such layers directly relate to the plasma conditions. Good interface passivation is obtained from highly depleted silane plasmas. Based upon this finding, layers deposited in a large-area very high frequency (40.68 MHz) PECVD reactor were optimized for heterojunction solar cells, yielding aperture efficiencies up to 20.3% on 4 cm<superscript>2</superscript> cells. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 97
- Issue :
- 18
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 55032733
- Full Text :
- https://doi.org/10.1063/1.3511737