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Effect of vapor phase composition on the properties of CVD 3 C-SiC.
- Source :
- Inorganic Materials; Apr2011, Vol. 47 Issue 4, p369-374, 6p, 3 Black and White Photographs, 3 Charts, 1 Graph
- Publication Year :
- 2011
-
Abstract
- We have studied the effect of silicon-enriched vapor phase composition, deposition temperature, and CHSiCl precursor concentration on the microstructure, resistivity, and compressive strength of 3 C-SiC layers and optimized the conditions for the growth of polycrystalline 3 C-SiC layers possessing high resistivity and compressive strength. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00201685
- Volume :
- 47
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Inorganic Materials
- Publication Type :
- Academic Journal
- Accession number :
- 59650149
- Full Text :
- https://doi.org/10.1134/S0020168511040157