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Colored timed Petri nets for modeling and analysis of cluser tools.
- Source :
- Asian Journal of Control; Jul2010, Vol. 12 Issue 3, p253-266, 14p
- Publication Year :
- 2010
Details
- Language :
- English
- ISSN :
- 15618625
- Volume :
- 12
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Asian Journal of Control
- Publication Type :
- Academic Journal
- Accession number :
- 61104124
- Full Text :
- https://doi.org/10.1002/asjc.183