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Embedded Capacitive Displacement Sensor for Nanopositioning Applications.

Authors :
Avramov-Zamurovic, Svetlana
Dagalakis, Nicholas G.
Lee, Rae Duk
Yoo, Jae Myung
Kim, Yong Sik
Yang, Seung Ho
Source :
IEEE Transactions on Instrumentation & Measurement; Jun2011, Vol. 60 Issue 7, p2730-2737, 8p
Publication Year :
2011

Abstract

The scale of nano-sized objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design, fabrication process, and testing of a capacitance-based displacement sensor. The nanopositioner application required active sensing area dimensions to be hundreds of micrometers, making it necessary to develop sensor electrodes that are a few micrometers in size. The advantages of the sensor presented are its noninvasive method and very low voltage necessary for signal conditioning. Initial results suggest good linearity and sensitivity of 0.001 \pF/\mu\m, permitting a reliable displacement resolution on the order of 100 nm. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00189456
Volume :
60
Issue :
7
Database :
Complementary Index
Journal :
IEEE Transactions on Instrumentation & Measurement
Publication Type :
Academic Journal
Accession number :
61129147
Full Text :
https://doi.org/10.1109/TIM.2011.2126150