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Design and performance verification of a microscope-based interferometer for miniature-specimen metrology.
- Source :
- Optical Engineering; Aug2005, Vol. 44 Issue 8, p085602-1-085602-8, 8p
- Publication Year :
- 2005
Details
- Language :
- English
- ISSN :
- 00913286
- Volume :
- 44
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Optical Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 61282640
- Full Text :
- https://doi.org/10.1117/1.2010147