Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiO x Thin Films.

MLA

Virostko, P., et al. “Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiO x Thin Films.” Contributions to Plasma Physics, vol. 48, no. 5–7, July 2008, pp. 527–33. EBSCOhost, https://doi.org/10.1002/ctpp.200810085.

APA

Virostko, P., Hubička, Z., Čada, M., Adámek, P., Kment, Š., Tichý, M., & Jastrabík, L. (2008). Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiO x Thin Films. Contributions to Plasma Physics, 48(5–7), 527–533. https://doi.org/10.1002/ctpp.200810085

Chicago

Virostko, P., Z. Hubička, M. Čada, P. Adámek, Š. Kment, M. Tichý, and L. Jastrabík. 2008. “Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiO x Thin Films.” Contributions to Plasma Physics 48 (5–7): 527–33. doi:10.1002/ctpp.200810085.