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High resolution electron microscopy of amorphous interlayers between metal thin films and silicon.

Authors :
Chen, L.J.
Lin, J.H.
Lee, T.L.
Luo, C.H.
Hsieh, W.Y.
Liang, J.M.
Wang, M.H.
Source :
Microscopy Research & Technique; Jan1998, Vol. 40 Issue 2, p136-151, 16p
Publication Year :
1998

Details

Language :
English
ISSN :
1059910X
Volume :
40
Issue :
2
Database :
Complementary Index
Journal :
Microscopy Research & Technique
Publication Type :
Academic Journal
Accession number :
63342270
Full Text :
https://doi.org/10.1002/(SICI)1097-0029(19980115)40:2<136::AID-JEMT5>3.0.CO;2-T