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ChemInform Abstract: Recent Advances in Models for Thermal Oxidation of Silicon.
- Source :
- ChemInform; Mar2002, Vol. 33 Issue 11, pno-no, 1p
- Publication Year :
- 2002
Details
- Language :
- English
- ISSN :
- 09317597
- Volume :
- 33
- Issue :
- 11
- Database :
- Complementary Index
- Journal :
- ChemInform
- Publication Type :
- Academic Journal
- Accession number :
- 64697008
- Full Text :
- https://doi.org/10.1002/chin.200211213