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Reaction Kinetics in Silicon Chemical Vapor Deposition.

Authors :
Tonokura, Kenichi
Koshi, Mitsuo
Source :
ChemInform; Apr2003, Vol. 34 Issue 17, pno-no, 1p
Publication Year :
2003

Details

Language :
English
ISSN :
09317597
Volume :
34
Issue :
17
Database :
Complementary Index
Journal :
ChemInform
Publication Type :
Academic Journal
Accession number :
64725471
Full Text :
https://doi.org/10.1002/chin.200317227