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Dry Etching of Electronic Oxides, Polymers, and Semiconductors.
- Source :
- Plasma Processes & Polymers; Jan2005, Vol. 2 Issue 1, p16-37, 22p
- Publication Year :
- 2005
Details
- Language :
- English
- ISSN :
- 16128850
- Volume :
- 2
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Plasma Processes & Polymers
- Publication Type :
- Academic Journal
- Accession number :
- 64945316
- Full Text :
- https://doi.org/10.1002/ppap.200400035