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Innovations in lithography metrology for characterization of phase-shift mask materials.

Authors :
Harrison, Dale A.
Lam, John C.
Forouhi, A. Rahim
Source :
Proceedings of SPIE; Nov2001, Issue 1, p233-240, 8p
Publication Year :
2001

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65610684
Full Text :
https://doi.org/10.1117/12.410698