Suspended thermal oxide trench isolation for SCS MEMS.

MLA

Webb, Russell Y., et al. “Suspended Thermal Oxide Trench Isolation for SCS MEMS.” Proceedings of SPIE, no. 1, Nov. 1998, pp. 196–99. EBSCOhost, https://doi.org/10.1117/12.325740.

APA

Webb, R. Y., Adams, S. G., & MacDonald, N. C. (1998). Suspended thermal oxide trench isolation for SCS MEMS. Proceedings of SPIE, 1, 196–199. https://doi.org/10.1117/12.325740

Chicago

Webb, Russell Y., Scott G. Adams, and Noel C. MacDonald. 1998. “Suspended Thermal Oxide Trench Isolation for SCS MEMS.” Proceedings of SPIE, no. 1 (November): 196–99. doi:10.1117/12.325740.