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Micromachined capacitive switches at microwave frequencies.

Authors :
Wong, Chee H.
Tan, M. J.
Guo, Li Hui
Huang, J.-M.
Liew, Kim M.
Liu, Ai Q.
Source :
Proceedings of SPIE; Nov2000, Issue 1, p140-148, 9p
Publication Year :
2000

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65688808
Full Text :
https://doi.org/10.1117/12.395601