Back to Search
Start Over
Design and analysis of across-chip linewidth variation for printed features at 130 nm and below.
- Source :
- Proceedings of SPIE; Nov2000, Issue 1, p168-177, 10p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 0277786X
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 65696233
- Full Text :
- https://doi.org/10.1117/12.386469