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Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer.

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65898279
Full Text :
https://doi.org/10.1117/12.507111