Fabrication and Characterization of Nanoscale NiO Resistance Change Memory (RRAM) Cells With Confined Conduction Paths.

This paper introduces a novel structure for filamentary-conduction-type resistance change memory. The new structure utilizes the fringing field from the top metal electrode to effectively confine the position of the filaments in the cell. Nanoscale (100–50 nm) memory cells are fabricated using nickel oxide (NiO) thin film as the resistance-switching layer to demonstrate the feasibility and functionality of the new structure. The fabricated nanoscale memory cells achieved low reset current (100–200 \mu\A), narrower distribution in low-resistance states, and higher on/off ratio than those of the standard structure. In addition, good scalability down to 50 nm was demonstrated. [ABSTRACT FROM AUTHOR]