Interfaces in Mo/Si multilayers.

MLA

Slaughter, Jon M., et al. “Interfaces in Mo/Si Multilayers.” Proceedings of SPIE, no. 1, Nov. 1991, pp. 73–82. EBSCOhost, https://doi.org/10.1117/12.23177.

APA

Slaughter, J. M., Kearney, P. A., Schulze, D. W., Falco, C. M., Hills, C. R., Saloman, E. B., & Watts, R. N. (1991). Interfaces in Mo/Si multilayers. Proceedings of SPIE, 1, 73–82. https://doi.org/10.1117/12.23177

Chicago

Slaughter, Jon M., Patrick A. Kearney, Dean W. Schulze, Charles M. Falco, C. R. Hills, Edward B. Saloman, and Richard N. Watts. 1991. “Interfaces in Mo/Si Multilayers.” Proceedings of SPIE, no. 1 (November): 73–82. doi:10.1117/12.23177.