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The nature of defect layer formation for arsenic ion implantation.
- Source :
- Journal of Applied Physics; May1983, Vol. 54 Issue 5, p2316-2326, 11p
- Publication Year :
- 1983
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 54
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 72870683
- Full Text :
- https://doi.org/10.1063/1.332389