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Factors affecting the growth of an integrated Ga1-xInxAs/InP PIN-FET by molecular beam epitaxy.

Authors :
Scott, E. G.
Wake, D.
Livingstone, A. W.
Andrews, D. A.
Davies, G. J.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1985, Vol. 3 Issue 3, p816-819, 4p
Publication Year :
1985

Details

Language :
English
ISSN :
0734211X
Volume :
3
Issue :
3
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
Publication Type :
Academic Journal
Accession number :
74324623
Full Text :
https://doi.org/10.1116/1.583109