Cite
Cathode cooling apparatus for a planar magnetron sputtering system.
MLA
Lake, M. R., and G. L. Harding. “Cathode Cooling Apparatus for a Planar Magnetron Sputtering System.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 2, no. 3, July 1984, pp. 1391–93. EBSCOhost, https://doi.org/10.1116/1.572372.
APA
Lake, M. R., & Harding, G. L. (1984). Cathode cooling apparatus for a planar magnetron sputtering system. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 2(3), 1391–1393. https://doi.org/10.1116/1.572372
Chicago
Lake, M. R., and G. L. Harding. 1984. “Cathode Cooling Apparatus for a Planar Magnetron Sputtering System.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 2 (3): 1391–93. doi:10.1116/1.572372.