Low-range flowmeters for use with vacuum and leak standards.

Authors :: McCulloh, K. E.
Tilford, C. R.
Ehrlich, C. D.
Long, F. G.
Source :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1987, Vol. 5 Issue 3, p376-381, 6p
Publication Year :: 1987

Language :: English
ISSN :: 07342101
Volume :: 5
Issue :: 3
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :: Academic Journal
Accession number :: 74328446
Full Text :: https://doi.org/10.1116/1.574163