A study of the linearity of transfer leaks and a helium leak detector.

MLA

Ehrlich, C. D., et al. “A Study of the Linearity of Transfer Leaks and a Helium Leak Detector.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 8, no. 6, Nov. 1990, pp. 4086–91. EBSCOhost, https://doi.org/10.1116/1.576444.

APA

Ehrlich, C. D., Tison, S. A., Hsiao, H. Y., & Ward, D. B. (1990). A study of the linearity of transfer leaks and a helium leak detector. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 8(6), 4086–4091. https://doi.org/10.1116/1.576444

Chicago

Ehrlich, C. D., S. A. Tison, H. Y. Hsiao, and D. B. Ward. 1990. “A Study of the Linearity of Transfer Leaks and a Helium Leak Detector.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 8 (6): 4086–91. doi:10.1116/1.576444.