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A miniature x-ray compatible sputtering system for studying in situ high Tc thin film growth.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1991, Vol. 9 Issue 1, p128-132, 5p
- Publication Year :
- 1991
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 9
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74330745
- Full Text :
- https://doi.org/10.1116/1.577112