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Measuring the electrical characteristics of thin polymeric films.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2000, Vol. 18 Issue 1, p257-260, 4p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 18
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74335749
- Full Text :
- https://doi.org/10.1116/1.582143