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Measuring the electrical characteristics of thin polymeric films.

Authors :
Gladys, M.
Greig, P.
Dastoor, P.
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2000, Vol. 18 Issue 1, p257-260, 4p
Publication Year :
2000

Details

Language :
English
ISSN :
07342101
Volume :
18
Issue :
1
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
74335749
Full Text :
https://doi.org/10.1116/1.582143