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Fabrication of NiSi2 nanocrystals embedded in SiO2 with memory effect by oxidation of the amorphous Si/Ni/SiO2 structure.

Authors :
Yeh, P. H.
Wu, H. H.
Yu, C. H.
Chen, L. J.
Liu, P. T.
Hsu, C. H.
Chang, T. C.
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2005, Vol. 23 Issue 4, p851-855, 5p
Publication Year :
2005

Details

Language :
English
ISSN :
07342101
Volume :
23
Issue :
4
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
74338039
Full Text :
https://doi.org/10.1116/1.1913678