Back to Search Start Over

Influence of substrate temperature on the growth of InGaAs layers on (111)B GaAs.

Authors :
Yoo, H. M.
Ohuchi, F. S.
Stoebe, T. G.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 3, p542-545, 4p
Publication Year :
1993

Details

Language :
English
ISSN :
10711023
Volume :
11
Issue :
3
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74339557
Full Text :
https://doi.org/10.1116/1.586797