Increasing the value of atomic force microscopy process metrology using a high-accuracy scanner, tip characterization, and morphological image analysis.

Details

Language :

English

ISSN :

10711023

Volume :

14

Issue :

2

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures

Publication Type :

Academic Journal

Accession number :

74341473

Full Text :

https://doi.org/10.1116/1.589135